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F6589

Hamamatsu Corporation
Part Number F6589
Manufacturer Hamamatsu Corporation
Description ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE
Published Mar 30, 2005
Detailed Description ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589 FEATURES q Ultra Thin Type: 2.5 mm (Max.) • Detection at closed distance...
Datasheet PDF File F6589 PDF File

F6589
F6589


Overview
ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589 FEATURES q Ultra Thin Type: 2.
5 mm (Max.
) • Detection at closed distance from samples q Flexible Lead Out (polymide film) • Easy system design with a flexible wiring • Low outguessing for high vacuum operation q Light Weight APPLICATIONS q SEM q FIB System q Mask Aligner q Electron Beam Measuring System TMCPF0083 SPECIFICATIONS Parameter Value Unit GENERAL Assembly Outer Diameter Effective Diameter Maximum Height MCP Channel Diameter MCP Stage Number Centerpipe Inner Diameter Dead Area around Center Hole Electrical Potential MCP-in Anode 28.
0 11.
0 2.
5 12 2 1 4 -0.
4 to +0.
4 +2.
4 (Max.
) mm mm mm µm stage mm mm kV MAXIMUM RATINGS MCP Supply Voltage (In-Out) MCP Out-Anode Voltage Anode-Substrate Voltage Operating Vacuum Condition Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking • Not allowed to be baked.
2.
0 0.
4 2.
4 Less than 6.
7 × 10 -4 (5 × 10 -6) -50 to +70 200 8 Less than 6.
7 × 10 -4 (5 × 10 -6) kV kV kV ...



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