Part Number
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MS761 |
Manufacturer
|
Intersema |
Description
|
PRESSURE SENSOR DIE |
Published
|
Apr 7, 2015 |
Detailed Description
|
MS761
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa bar range (1 bar or 14.5 PSI) • High Sensitivity • ROHS-Compatible &...
|
Datasheet
|
MS761
|
Overview
MS761
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa bar range (1 bar or 14.
5 PSI) • High Sensitivity • ROHS-Compatible & Pb-free1
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum.
Implanted resistors make use of the piezo-resistive effect.
The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
• Uncompensated pressure sensor die • High Sensitivity: Output Span 240 mV @ 5V • Temperature Range -40°C …+ 125°C
• Linearity 0.
15 % (typical) • Small Die S...
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