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MS7212

Measurement
Part Number MS7212
Manufacturer Measurement
Description PRESSURE SENSOR DIE
Published Apr 26, 2017
Detailed Description MS7212 PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute press...
Datasheet PDF File MS7212 PDF File

MS7212
MS7212

Overview
MS7212 PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pressure sensors • Hermetic sensor • RoHS-compatible & Pb-free1 DESCRIPTION The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment.
A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap.
The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled Pyrex™ is bonded on the backside.
As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS72...


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