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FC261

Part Number	FC261
Manufacturer	ETC
Description	Mass Flow Controllers and Flowmeters
Published	Mar 30, 2005
Detailed Description	Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and p...
Datasheet	FC261 PDF File

Overview

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter.
These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
Excellent Performance Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature correctio...

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