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TQPHT

Part Number	TQPHT
Manufacturer	TriQuint Semiconductor
Description	pHEMT Foundry Service
Published	Jul 8, 2007
Detailed Description	Production Process TQPHT 0.5 um pHEMT Foundry Service Features Metal 2 Dielectric Metal 1 Dielectric MIM Metal Metal 2...
Datasheet	TQPHT PDF File

Overview

Production Process TQPHT 0.
5 um pHEMT Foundry Service Features Metal 2 Dielectric Metal 1 Dielectric MIM Metal Metal 2 - 4um Dielectric Metal 1 - 2um • • • • • Metal 1 NiCr Isolation Implant Isolation Implant Nitride N+ Pseudomorphic Channel Metal 0 pHEMT MIM Capacitor Semi-Insulating GaAs Substrate NiCr Resistor • • • • • • 0.
5 um pHEMT Device Cross-Section com D-Mode, -0.
8 V Vp InGaAs Active Layer pHEMT Process 0.
5 um Optical Lithography Gates 17 V D-G Breakdown Voltage High Density Interconnects: • 2 Global • 1 Local High-Q Passives Thin Film Resistors High Value Capacitors Backside Vias Optional Based on Production 0.
25 µm pHEMT and Passives Processes TOM3 FE...

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