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MS761

Intersema
Part Number MS761
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 7, 2015
Detailed Description MS761 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa bar range (1 bar or 14.5 PSI) • High Sensitivity • ROHS-Compatible &...
Datasheet PDF File MS761 PDF File

MS761
MS761

Overview
MS761 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa bar range (1 bar or 14.
5 PSI) • High Sensitivity • ROHS-Compatible & Pb-free1 DESCRIPTION The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum.
Implanted resistors make use of the piezo-resistive effect.
The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES • Uncompensated pressure sensor die • High Sensitivity: Output Span 240 mV @ 5V • Temperature Range -40°C …+ 125°C • Linearity 0.
15 % (typical) • Small Die Size 2.
00 X 1.
86 mm • Low cost, High reliability APPLICATION • For high resolution absolute sensor systems • Engine Controls • Barometers, Altimeters, Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone...


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