Pre-Production Process
0.5 um E/D pHEMT Foundry Service
Features
Metal 2 Dielectric Metal 2 - 4um
TQPED
Dielectric Metal 1 - 2um
Metal 1
Metal 1 Dielectric
MIM Metal
NiCr
Nitride N+ Pseudomorphic Channel
Metal 0
Isolation Implant Isolation Implant MIM Capacitor NiCr Resistor
E-Mode / D-Mode
pHEMT
Semi-Insulating GaAs Substrate
...
