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MS79005

Intersema
Part Number MS79005
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 15, 2015
Detailed Description MS79005 PRESSURE SENSOR DIE (0-0.5 BAR) • 0 to 50 kPa range (500 mbar or 7.5 PSI) • Absolute/differential pressure sens...
Datasheet PDF File MS79005 PDF File

MS79005
MS79005

Overview
MS79005 PRESSURE SENSOR DIE (0-0.
5 BAR) • 0 to 50 kPa range (500 mbar or 7.
5 PSI) • Absolute/differential pressure sensors • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS79005 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS79005-A_0.
2) or 0.
5 mm (MS79005-A_0.
5).
Two gauge versions available: one with a drilled Pyrex glass (MS79005-D) and the other without Pyrex glass (MS79005-S).
FEATURES • Uncompensated pressure sensor die • Output Span 150mV @ 5V • Temperature Range -40°…+125°C • Linearity 0.
05% (typical) • Very small Die Size 1.
78 x 1.
78mm (MS79005-A) • Low Cost, High reliability APPLICATION • For absolute or differential pressure sensor systems • Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ / EPI Out+ Out- R5+ R6+ GND1 GND2 R5- R6- R5 and R6 are placed on bulk Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground R5+ : Reference Resistor 5: positive access R5- : Reference Resistor 5: negative access R6+ : Reference Resistor 6: positive access R6- : Reference Resistor 6: negative access 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA79005_000.
doc 000790051447 ECN 1186 May 07, 2009 1/5 BOND PAD CONFIGUTRATION Vs+/Epi MS7901 Out- R5+ R6+ R5- R6- Out+ GN...


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