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MS7905

Intersema
Part Number MS7905
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 15, 2015
Detailed Description MS7905 PRESSURE SENSOR DIE (0-5 BAR) • 0 to 500 kPa range (5 bar or 73 PSI) • Absolute/differential pressure sensors •...
Datasheet PDF File MS7905 PDF File

MS7905
MS7905


Overview
MS7905 PRESSURE SENSOR DIE (0-5 BAR) • 0 to 500 kPa range (5 bar or 73 PSI) • Absolute/differential pressure sensors • High linearity, small size • High overpressure capability (18 bar) • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7905 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7905-A_0.
2) or 0.
5 mm (MS7905-A_0.
5).
Two gauge versions are available: one with a drilled Pyrex glass (MS7905-D) and the other without Pyrex glass (MS7905-S).
FEATURES • Uncompensated pressure sensor die • Output span 150mV @ 5V • Temperature range -40°…+125°C • Linearity 0.
05% (typical) • Very small die size 1.
72 x 1.
58 mm (MS7905-A) • Low cost, high reliability APPLICATION • Absolute pressure sensor systems • Differential/gauge pressure sensor systems • Engine controls • Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA7905_002.
doc 000079051052 ECN 1186 May 6, 2009 1/5 MS7912 BOND PAD CONFIGURATION Vs+ Epi Out- Out+ GND1 GND2 LAYOUT (Absolute sensors) MS7905-A_0.
2 Important remarks: As the sensing elements are diffused resistances, the voltage applied ...


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