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MS7901

Intersema
Part Number MS7901
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 15, 2015
Detailed Description MS7901 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa range (1 bar or 14.5 PSI) • Absolute/differential pressure sensors...
Datasheet PDF File MS7901 PDF File

MS7901
MS7901

Overview
MS7901 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa range (1 bar or 14.
5 PSI) • Absolute/differential pressure sensors • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7901 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7901-A_0.
2) or 0.
5 mm (MS7901-A_0.
5).
There are two gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass (MS7901-S).
FEATURES • Uncompensated pressure sensor die • Output span 150mV @ 5V • Temperature range -40°…+125°C • Linearity 0.
05% (typical) • Very small die size 1.
78 x 1.
78 mm (MS7901-A) • Low cost, high reliability APPLICATION • Absolute pressure sensor systems • Differential/gauge pressure sensor systems • Barometers, altimeters • Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ / EPI Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ Out- Out+ : Positive output GND1 : Ground GND2 : Ground R5+ R6+ R5+ : Reference Resistor 5: positive access R5 and R6 are GND1 GND2 placed on bulk R5- R6- R5- : Reference Resistor 5: negative access R6+ : Reference Resistor 6: positive access R6- : Reference Resistor 6: negative access 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA7901_005.
doc 00007901872 ECN 1178 January 23rd, 2009 1/5 BOND PA...


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