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MS7912

Intersema
Part Number MS7912
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 15, 2015
Detailed Description MS7912 PRESSURE SENSOR DIE (0-12 BAR) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute/differential pressure senso...
Datasheet PDF File MS7912 PDF File

MS7912
MS7912

Overview
MS7912 PRESSURE SENSOR DIE (0-12 BAR) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum.
Implanted resistors make use of the piezo-resistive effect.
The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES • Uncompensated pressure sensor die • Output Span 150mV @ 5V • Temperature Range -40°…+125°C • Linearity 0.
05% (typical) • Small Die Size 1.
72 x 1.
58mm • Low Cost, High reliability APPLICATION • For absolute or differential pressure sensor systems • Engine controls • Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA7912_003.
doc 00007912636 ECN 743 May 05th, 2005 1/4 PAD OUT Vs+ Epi Out- MS7912 Out+ LAYOUT GND1 GND2 MS7912A Important remarks: As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and GND2) has to be lower than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die MS7912D Bondable area = 100 x 100 um Bondable area = 100 x 100 um DA7912_003.
doc 00007912636 ECN 743 May 05th, 2005 2/4 FULL SCALE PRESSURE kPa bar mbar 1200 12 12000 PSI 174 atm mm Hg m H2O Inc...


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