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MS7970

Intersema
Part Number MS7970
Manufacturer Intersema
Description PRESSURE SENSOR DIE
Published Apr 15, 2015
Detailed Description MS7970 PRESSURE SENSOR DIE (0-70 BAR) • 0 to 7000 kPa range (70 bar or 1015 PSI) • Absolute/differential pressure sens...
Datasheet PDF File MS7970 PDF File

MS7970
MS7970

Overview
MS7970 PRESSURE SENSOR DIE (0-70 BAR) • 0 to 7000 kPa range (70 bar or 1015 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7970 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7970-A_0.
2) or 0.
5 mm (MS7970-A_0.
5).
There are two gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass (MS7970-S).
FEATURES • Uncompensated pressure sensor die • Output span 310mV @ 5V • Temperature range -40°…+125°C • Linearity 0.
25% (typical) • Very small die size 1.
72 x 1.
58 mm (MS7970-A) • Low cost, high reliability APPLICATION • Absolute pressure sensor systems • Differential/gauge pressure sensor systems • Engine controls • Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE).
DA7970_000.
doc 000079701592 ECN 1205 May 11, 2009 1/5 MS7912 BOND PAD CONFIGURATION Vs+ Epi Out- Out+ GND1 GND2 LAYOUT (Absolute sensors) MS7970-A_0.
2 Important remarks: As the sensing elements are diffused resistances, the voltage applied on the ground pads (GND1 and ...


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