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MS7901

Part Number	MS7901
Manufacturer	Intersema
Description	PRESSURE SENSOR DIE
Published	Apr 15, 2015
Detailed Description	MS7901 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa range (1 bar or 14.5 PSI) • Absolute/differential pressure sensors...
Datasheet	MS7901 PDF File

Overview

MS7901 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa range (1 bar or 14.
5 PSI) • Absolute/differential pressure sensors • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7901 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7901-A_0.
2) or 0.
5 mm (MS7901-A_0.
5).
There are two ...

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