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MS7930

Part Number	MS7930
Manufacturer	Intersema
Description	PRESSURE SENSOR DIE
Published	Apr 15, 2015
Detailed Description	MS7930 PRESSURE SENSOR DIE (0-30 BAR) • 0 to 3000 kPa range (30 bar or 435 PSI) • Absolute/differential pressure senso...
Datasheet	MS7930 PDF File

Overview

MS7930 PRESSURE SENSOR DIE (0-30 BAR) • 0 to 3000 kPa range (30 bar or 435 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7930 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7930-A_0.
2) or 0.
5 mm...

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